Lateral and vertical quantification of spin-coated polymer films on silicon by TOF-SIMS, XPS, and AFM

K. Norrman, K.B. Haugshøj, N.B. Larsen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Physical Chemistry Part B: Condensed Matter, Materials, Surfaces, Interfaces & Biophysical
    Volume106
    Pages (from-to)13114-13121
    ISSN1520-6106
    DOIs
    Publication statusPublished - 2002

    Cite this

    @article{7574977005ec435e9ee04b8bb47a67bc,
    title = "Lateral and vertical quantification of spin-coated polymer films on silicon by TOF-SIMS, XPS, and AFM",
    keywords = "7-I poly",
    author = "K. Norrman and K.B. Haugsh{\o}j and N.B. Larsen",
    year = "2002",
    doi = "10.1021/jp020069o",
    language = "English",
    volume = "106",
    pages = "13114--13121",
    journal = "Journal of Physical Chemistry Part B: Condensed Matter, Materials, Surfaces, Interfaces & Biophysical",
    issn = "1520-6106",
    publisher = "American Chemical Society",

    }

    Lateral and vertical quantification of spin-coated polymer films on silicon by TOF-SIMS, XPS, and AFM. / Norrman, K.; Haugshøj, K.B.; Larsen, N.B.

    In: Journal of Physical Chemistry Part B: Condensed Matter, Materials, Surfaces, Interfaces & Biophysical, Vol. 106, 2002, p. 13114-13121.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - Lateral and vertical quantification of spin-coated polymer films on silicon by TOF-SIMS, XPS, and AFM

    AU - Norrman, K.

    AU - Haugshøj, K.B.

    AU - Larsen, N.B.

    PY - 2002

    Y1 - 2002

    KW - 7-I poly

    U2 - 10.1021/jp020069o

    DO - 10.1021/jp020069o

    M3 - Journal article

    VL - 106

    SP - 13114

    EP - 13121

    JO - Journal of Physical Chemistry Part B: Condensed Matter, Materials, Surfaces, Interfaces & Biophysical

    JF - Journal of Physical Chemistry Part B: Condensed Matter, Materials, Surfaces, Interfaces & Biophysical

    SN - 1520-6106

    ER -