Laser self-mixing interferometry in VCSELs - an ultra-compact and massproduceable deflection detection system for nanomechanical polymer cantilever sensors

David Larsson, Kresten Yvind, Jørn Märcher Hvam, Anders Greve, Anja Boisen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

We have realised an ultra-compact deflection detection system based on laser self-mixing interferometry in a Vertical-Cavity Surface-Emitting Laser (VCSEL). The system can be used together with polymer nanomechanical cantilevers to form chemical sensors capable of detecting less than 1nm deflection.
Original languageEnglish
Title of host publicationInternational Workshop on Nanomechanical Cantilever Sensors
Place of PublicationMainz, Germany
Publication date2008
Publication statusPublished - 2008
EventInternational Workshop on Nanomechanical Cantilever Sensors - Mainze, Germany
Duration: 19 May 200821 May 2008

Workshop

WorkshopInternational Workshop on Nanomechanical Cantilever Sensors
CountryGermany
CityMainze
Period19/05/200821/05/2008

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