Abstract
Laser ablation is widely used to assist in the fabrication of prototype lithium manganate (LiMn2O4) thin film structures for Li-ion battery electrodes via the pulsed laser deposition technique. However, films can be considerably Li and/or 0 deficient, depending the deposition conditions used. Here we present data on the ionic component of laser-produced plasma in laser ablation of lithium manganate with ns excimer laser. Plasma was monitored using an electrical Langmuir ion probe, in time-of-flight mode in conjunction with mass spectrometry to identify the dominant ionic species. Ablation in vacuum at similar to 2.5 J cm(-2) revealed the plasma's ionic component was composed primarily of singly charged Li and Mn ions. The time-of-flight data indicates significant deceleration of the plasma when ablation is carried out in an oxygen background gas pressure of the order of 10 Pa. The implications for thin film growth are considered in terms of the possible gas phase interactions and/or thin film re-sputtering yield. (c) 2007 Elsevier B.V. All rights reserved.
Original language | English |
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Journal | Applied Surface Science |
Volume | 254 |
Issue number | 4 |
Pages (from-to) | 811-815 |
ISSN | 0169-4332 |
DOIs | |
Publication status | Published - 2007 |
Externally published | Yes |
Event | Symposium on Laser Synthesis and Processing of Advanced Materials held at the E-MRS 2007 Spring Meeting - Strasbourg, France Duration: 28 May 2007 → 1 Jun 2007 |
Conference
Conference | Symposium on Laser Synthesis and Processing of Advanced Materials held at the E-MRS 2007 Spring Meeting |
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Country/Territory | France |
City | Strasbourg |
Period | 28/05/2007 → 01/06/2007 |