Original language | English |
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Journal | Microelectronic Engineering |
Volume | 73–74 |
Pages (from-to) | 491–495 |
ISSN | 0167-9317 |
Publication status | Published - 2004 |
Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping
Esko Sebastian Forsén, P. Carlberg, L. Montelius, Anja Boisen
Research output: Contribution to journal › Journal article › Research › peer-review