Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

Esko Sebastian Forsén, P. Carlberg, L. Montelius, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume73–74
    Pages (from-to)491–495
    ISSN0167-9317
    Publication statusPublished - 2004

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