Laser devices via greyscale EBL on functionalized SU-8

Søren Balslev, Torben Rasmussen, P. Shi, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Internternational Conference on Micro and Nano Engineering, MNE 2005
    Place of PublicationVienna, Austria
    Publication date2005
    Publication statusPublished - 2005
    Event31st International Conference on Micro- and Nano-Engineering 2005 - Vienna, Austria
    Duration: 19 Sep 200522 Sep 2005
    Conference number: 31

    Conference

    Conference31st International Conference on Micro- and Nano-Engineering 2005
    Number31
    CountryAustria
    CityVienna
    Period19/09/200522/09/2005

    Cite this

    Balslev, S., Rasmussen, T., Shi, P., & Kristensen, A. (2005). Laser devices via greyscale EBL on functionalized SU-8. In Proceedings of the Internternational Conference on Micro and Nano Engineering, MNE 2005