Laser and AFM lithography on aluminum: a toolbox for fabrication of nanoelectromechanical structures.

Anja Boisen, G. Abadal, Z.J. Davis, Ole Hansen, Francois Grey

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationLaser and AFM lithography on aluminum: a toolbox for fabrication of nanoelectromechanical structures.
    Publication date1999
    Pages337-338
    Publication statusPublished - 1999
    Event10th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Proximal Probe Microscopy - Seoul, Korea, Republic of
    Duration: 19 Jul 199923 Jul 1999

    Conference

    Conference10th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Proximal Probe Microscopy
    CountryKorea, Republic of
    CitySeoul
    Period19/07/199923/07/1999

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