Abstract
| Original language | English |
|---|---|
| Journal | Microelectronic Engineering |
| Volume | 209 |
| Pages (from-to) | 60-65 |
| ISSN | 0167-9317 |
| DOIs | |
| Publication status | Published - 2019 |
Keywords
- High aspect ratio gratings
- Laser ablation
- Medical imaging
- Phase-contrast imaging
- Tungsten gratings
- X-ray optics
Cite this
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Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications. / Silvestre, Chantal M.; Hemmingsen, Jens H.; Dreier, Erik S.; Kehres, Jan; Hansen, Ole.
In: Microelectronic Engineering, Vol. 209, 2019, p. 60-65.Research output: Contribution to journal › Journal article › Research › peer-review
TY - JOUR
T1 - Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications
AU - Silvestre, Chantal M.
AU - Hemmingsen, Jens H.
AU - Dreier, Erik S.
AU - Kehres, Jan
AU - Hansen, Ole
PY - 2019
Y1 - 2019
N2 - Periodic two-dimensional tungsten X-ray optical gratings were fabricated using a combination of pico-second laser ablation and wet chemical etch. A 200 μm thick cold-rolled sheet of tungsten (99.97%) was used as base material for the fabrication of a 1.5 × 1.5 cm2 periodic grating with an array of circular holes of approximately 12:1 aspect ratio. The laser parameters were optimized to obtain through-hole diameters slightly smaller than the desired final dimension. Subsequent wet etching was used to precisely control the diameter of through-holes. The through-hole profile was characterized using scanning electron microscopy (SEM) and showed a slight conical shape with a slope of 1.3%. The two-dimensional tungsten absorption grating was successfully tested in an X-ray phase-contrast imaging setup. The method has proven to have some relevant benefits, such as good reproducibility and fairly easy fabrication due to few manufacturing steps.
AB - Periodic two-dimensional tungsten X-ray optical gratings were fabricated using a combination of pico-second laser ablation and wet chemical etch. A 200 μm thick cold-rolled sheet of tungsten (99.97%) was used as base material for the fabrication of a 1.5 × 1.5 cm2 periodic grating with an array of circular holes of approximately 12:1 aspect ratio. The laser parameters were optimized to obtain through-hole diameters slightly smaller than the desired final dimension. Subsequent wet etching was used to precisely control the diameter of through-holes. The through-hole profile was characterized using scanning electron microscopy (SEM) and showed a slight conical shape with a slope of 1.3%. The two-dimensional tungsten absorption grating was successfully tested in an X-ray phase-contrast imaging setup. The method has proven to have some relevant benefits, such as good reproducibility and fairly easy fabrication due to few manufacturing steps.
KW - High aspect ratio gratings
KW - Laser ablation
KW - Medical imaging
KW - Phase-contrast imaging
KW - Tungsten gratings
KW - X-ray optics
U2 - 10.1016/j.mee.2019.03.007
DO - 10.1016/j.mee.2019.03.007
M3 - Journal article
VL - 209
SP - 60
EP - 65
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
ER -