Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications

Chantal M. Silvestre*, Jens H. Hemmingsen, Erik S. Dreier, Jan Kehres, Ole Hansen

*Corresponding author for this work

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Periodic two-dimensional tungsten X-ray optical gratings were fabricated using a combination of pico-second laser ablation and wet chemical etch. A 200 μm thick cold-rolled sheet of tungsten (99.97%) was used as base material for the fabrication of a 1.5 × 1.5 cm2 periodic grating with an array of circular holes of approximately 12:1 aspect ratio. The laser parameters were optimized to obtain through-hole diameters slightly smaller than the desired final dimension. Subsequent wet etching was used to precisely control the diameter of through-holes. The through-hole profile was characterized using scanning electron microscopy (SEM) and showed a slight conical shape with a slope of 1.3%. The two-dimensional tungsten absorption grating was successfully tested in an X-ray phase-contrast imaging setup. The method has proven to have some relevant benefits, such as good reproducibility and fairly easy fabrication due to few manufacturing steps.
Original languageEnglish
JournalMicroelectronic Engineering
Pages (from-to)60-65
Publication statusPublished - 2019


  • High aspect ratio gratings
  • Laser ablation
  • Medical imaging
  • Phase-contrast imaging
  • Tungsten gratings
  • X-ray optics


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