Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies

X.G. Peralta, M.C. Wanke, C.L. Arrington, J.D. Williams, I. Brener, A. Strikwerda, R.D. Averitt, W.J. Padilla, E. Smirnova, A.J. Taylor, J.F. O'Hara

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

A possible path for fabricating three-dimensional metamaterials with curved geometries at optical and infrared frequencies is to stack flexible metamaterial layers. We have fabricated highly uniform metamaterials at terahertz frequencies on large-area, low-stress, free-standing 1 mu m thick silicon nitride membranes. Their response remains comparable to that of similar structures on thick substrates as measured by the quality factor of the resonances. Transmission measurements with a Fourier transform infrared spectrometer highlight the advantage of fabricating high frequency metamaterials on thin membranes as etalon effects are eliminated. Releasing the membranes enables layering schemes and placement onto curved surfaces in order to create three-dimensional structures.
Original languageEnglish
JournalApplied Physics Letters
Volume94
Issue number16
Pages (from-to)161113
Number of pages1
ISSN0003-6951
DOIs
Publication statusPublished - 2009
Externally publishedYes

Cite this

Peralta, X. G., Wanke, M. C., Arrington, C. L., Williams, J. D., Brener, I., Strikwerda, A., Averitt, R. D., Padilla, W. J., Smirnova, E., Taylor, A. J., & O'Hara, J. F. (2009). Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies. Applied Physics Letters, 94(16), 161113. https://doi.org/10.1063/1.3114416