Junction leakage measurements with micro four-point probes

Rong  Lin; Dirch Hjorth Petersen; Fei Wang; Bradley R. Yates; Kevin S. Jones; Ole Hansen; Alex Kontos; Peter Folmer Nielsen

Junction leakage measurements with micro four-point probes

Rong Lin, Dirch Hjorth Petersen, Fei Wang, Bradley R. Yates, Kevin S. Jones, Ole Hansen, Alex Kontos, Peter Folmer Nielsen

Surface Physics and Catalysis

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

We present a new, preparation-free method for measuring the leakage current density on ultra-shallow junctions. The junction leakage is found by making a series of four-point sheet resistance measurements on blanket wafers with variable electrode spacings. The leakage current density is calculated using a fit of the measured four-point resistances to an analytical two-sheet model. The validity of the approximation involved in the two-sheet model is verified by a comparison to finite element model calculations.

Original language	English
Journal	A I P Conference Proceedings Series
Volume	1496
Pages (from-to)	175-178
ISSN	0094-243X
Publication status	Published - 2012
Event	International Conference on Ion Implantation Technology - Valladolid, Spain Duration: 25 Jun 2012 → 29 Jun 2012 Conference number: 19th

Conference

Conference	International Conference on Ion Implantation Technology
Number	19th
Country/Territory	Spain
City	Valladolid
Period	25/06/2012 → 29/06/2012

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title = "Junction leakage measurements with micro four-point probes",

abstract = "We present a new, preparation-free method for measuring the leakage current density on ultra-shallow junctions. The junction leakage is found by making a series of four-point sheet resistance measurements on blanket wafers with variable electrode spacings. The leakage current density is calculated using a fit of the measured four-point resistances to an analytical two-sheet model. The validity of the approximation involved in the two-sheet model is verified by a comparison to finite element model calculations.",

author = "Rong Lin and Petersen, {Dirch Hjorth} and Fei Wang and Yates, {Bradley R.} and Jones, {Kevin S.} and Ole Hansen and Alex Kontos and Nielsen, {Peter Folmer}",

year = "2012",

language = "English",

volume = "1496",

pages = "175--178",

journal = "A I P Conference Proceedings Series",

issn = "0094-243X",

publisher = "American Institute of Physics",

note = "International Conference on Ion Implantation Technology ; Conference date: 25-06-2012 Through 29-06-2012",

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TY - GEN

T1 - Junction leakage measurements with micro four-point probes

AU - Lin, Rong

AU - Petersen, Dirch Hjorth

AU - Wang, Fei

AU - Yates, Bradley R.

AU - Jones, Kevin S.

AU - Hansen, Ole

AU - Kontos, Alex

AU - Nielsen, Peter Folmer

N1 - Conference code: 19th

PY - 2012

Y1 - 2012

N2 - We present a new, preparation-free method for measuring the leakage current density on ultra-shallow junctions. The junction leakage is found by making a series of four-point sheet resistance measurements on blanket wafers with variable electrode spacings. The leakage current density is calculated using a fit of the measured four-point resistances to an analytical two-sheet model. The validity of the approximation involved in the two-sheet model is verified by a comparison to finite element model calculations.

AB - We present a new, preparation-free method for measuring the leakage current density on ultra-shallow junctions. The junction leakage is found by making a series of four-point sheet resistance measurements on blanket wafers with variable electrode spacings. The leakage current density is calculated using a fit of the measured four-point resistances to an analytical two-sheet model. The validity of the approximation involved in the two-sheet model is verified by a comparison to finite element model calculations.

M3 - Conference article

SN - 0094-243X

VL - 1496

SP - 175

EP - 178

JO - A I P Conference Proceedings Series

JF - A I P Conference Proceedings Series

T2 - International Conference on Ion Implantation Technology

Y2 - 25 June 2012 through 29 June 2012

ER -

Junction leakage measurements with micro four-point probes

Abstract

Conference

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