Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication

Kristian Pontoppidan Larsen, Jan Tue Ravnkilde, Ole Hansen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	15
Issue number	4
Pages (from-to)	873-882
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/15/4/028
Publication status	Published - 2005

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title = "Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication",

author = "Larsen, {Kristian Pontoppidan} and Ravnkilde, {Jan Tue} and Ole Hansen",

year = "2005",

doi = "10.1088/0960-1317/15/4/028",

language = "English",

volume = "15",

pages = "873--882",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "4",

}

TY - JOUR

T1 - Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication

AU - Larsen, Kristian Pontoppidan

AU - Ravnkilde, Jan Tue

AU - Hansen, Ole

PY - 2005

Y1 - 2005

U2 - 10.1088/0960-1317/15/4/028

DO - 10.1088/0960-1317/15/4/028

M3 - Journal article

SN - 0960-1317

VL - 15

SP - 873

EP - 882

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 4

ER -