Abstract
Elastic emission machining (EEM) is one of the ultra-precision machining methods used to fabricate shapeswith 0.1 nm accuracy which is very useful in the manufacturing of high-precision optical mirrors used in X-ray microscopy and extreme ultraviolet lithography (EUVL). In this paper, a comparative analysis is carried out considering all the parameters affecting material removal rate, while using different type of tools - ball type and focusing nozzle type - for the flow control. In ball type EEM, the rotation speed of rotating sphere and particle concentration of machining slurry are the important factorsaffecting MRR (Material Removal Rate). In focusing nozzle type EEM nozzle aperture size, channel structure and stand-off distanceaffects MRR. Considering the physics of the EEM process and mechanisms governing the material removal phenomena, simulation has been carried out. It is observed that the experimental results match well with the results of simulation
| Original language | English |
|---|---|
| Journal | International Journal of Scientific Research |
| Volume | 3 |
| Issue number | 4 |
| Pages (from-to) | 195-197 |
| ISSN | 2277-8179 |
| Publication status | Published - 2014 |
| Externally published | Yes |
Keywords
- Elastic Emission Machining
- Precision Cutting
- Flow Control
- Simulation
- MRR
- Stand-off Distance