Investigations into localized laser pyrolysis of absorber-modified SU-8

Emil Ludvigsen; Nina Ritter Pedersen; Xiaolong Zhu; Rodolphe  Marie; David Mackenzie; Dirch H. Petersen; Anders Kristensen; Jenny Emnéus; Stephan S. Keller

Investigations into localized laser pyrolysis of absorber-modified SU-8

Emil Ludvigsen, Nina Ritter Pedersen, Xiaolong Zhu, Rodolphe Marie, David Mackenzie, Dirch H. Petersen, Anders Kristensen, Jenny Emnéus, Stephan S. Keller

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Original language	English
Publication date	2020
Number of pages	1
Publication status	Published - 2020
Event	CMEMS 2020 - Online Duration: 6 Jul 2020 → 8 Jul 2020 Conference number: 6

Conference

Conference	CMEMS 2020
Number	6
Location	Online
Period	06/07/2020 → 08/07/2020

Keywords

Pyrolysis
Lithography
SU-8
Laser
Carbon

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Cite this

@conference{864c88dc3f614cbb934ff1e0f6e0381c,

title = "Investigations into localized laser pyrolysis of absorber-modified SU-8",

keywords = "Pyrolysis, Lithography, SU-8, Laser, Carbon",

author = "Emil Ludvigsen and Pedersen, {Nina Ritter} and Xiaolong Zhu and Rodolphe Marie and David Mackenzie and Petersen, {Dirch H.} and Anders Kristensen and Jenny Emn{\'e}us and Keller, {Stephan S.}",

year = "2020",

language = "English",

note = "CMEMS 2020 ; Conference date: 06-07-2020 Through 08-07-2020",

}

TY - ABST

T1 - Investigations into localized laser pyrolysis of absorber-modified SU-8

AU - Ludvigsen, Emil

AU - Pedersen, Nina Ritter

AU - Zhu, Xiaolong

AU - Marie, Rodolphe

AU - Mackenzie, David

AU - Petersen, Dirch H.

AU - Kristensen, Anders

AU - Emnéus, Jenny

AU - Keller, Stephan S.

N1 - Conference code: 6

PY - 2020

Y1 - 2020

KW - Pyrolysis

KW - Lithography

KW - SU-8

KW - Laser

KW - Carbon

M3 - Conference abstract for conference

T2 - CMEMS 2020

Y2 - 6 July 2020 through 8 July 2020

ER -