Original languageEnglish
Publication date2020
Number of pages1
Publication statusPublished - 2020
EventCMEMS 2020 - Online
Duration: 1 Jul 20202 Jul 2020
Conference number: 6

Conference

ConferenceCMEMS 2020
Number6
LocationOnline
Period01/07/202002/07/2020

Keywords

  • Pyrolysis
  • Lithography
  • SU-8
  • Laser
  • Carbon

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