Investigation of Top/bottom  Electrode and Diffusion Barrier Layer for PZT thick film MEMS Sensors

Thomas Pedersen; Christian Carstensen Hindrichsen; R. Lou-Møller; Erik Vilain Thomsen

doi:10.1109/ICSENS.2007.4388510

Investigation of Top/bottom Electrode and Diffusion Barrier Layer for PZT thick film MEMS Sensors

Thomas Pedersen
, Christian Carstensen Hindrichsen
, R. Lou-Møller
, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

968 Downloads (Orbit)

Abstract

In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.

Original language	English
Title of host publication	Proceedings of IEEE Sensors 2007
Publisher	IEEE
Publication date	2007
Pages	756-759
ISBN (Print)	1-4244-1262-5
DOIs	https://doi.org/10.1109/ICSENS.2007.4388510
Publication status	Published - 2007
Event	IEEE Sensors 2007 - Atlanta, United States Duration: 28 Oct 2007 → 31 Oct 2007 Conference number: 6 https://ieeexplore.ieee.org/xpl/conhome/4388307/proceeding http://ewh.ieee.org/conf/sensors2007/

Conference

Conference	IEEE Sensors 2007
Number	6
Country/Territory	United States
City	Atlanta
Period	28/10/2007 → 31/10/2007
Internet address	https://ieeexplore.ieee.org/xpl/conhome/4388307/proceeding http://ewh.ieee.org/conf/sensors2007/

Bibliographical note

Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

Access to Document

10.1109/ICSENS.2007.4388510

PedersenFinal published version, 1.05 MB

OpenUrl availability

Full text

Cite this

@inproceedings{612adde9a1b54f1396d501150c17c2b9,

title = "Investigation of Top/bottom Electrode and Diffusion Barrier Layer for PZT thick film MEMS Sensors",

abstract = "In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.",

author = "Thomas Pedersen and Hindrichsen, \{Christian Carstensen\} and R. Lou-M{\o}ller and Thomsen, \{Erik Vilain\}",

note = "Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; IEEE Sensors 2007, IEEE Sensors 2007 ; Conference date: 28-10-2007 Through 31-10-2007",

year = "2007",

doi = "10.1109/ICSENS.2007.4388510",

language = "English",

isbn = "1-4244-1262-5",

pages = "756--759",

booktitle = "Proceedings of IEEE Sensors 2007",

publisher = "IEEE",

address = "United States",

url = "https://ieeexplore.ieee.org/xpl/conhome/4388307/proceeding, http://ewh.ieee.org/conf/sensors2007/",

}

TY - GEN

T1 - Investigation of Top/bottom Electrode and Diffusion Barrier Layer for PZT thick film MEMS Sensors

AU - Pedersen, Thomas

AU - Hindrichsen, Christian Carstensen

AU - Lou-Møller, R.

AU - Thomsen, Erik Vilain

N1 - Conference code: 6

PY - 2007

Y1 - 2007

N2 - In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.

AB - In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.

U2 - 10.1109/ICSENS.2007.4388510

DO - 10.1109/ICSENS.2007.4388510

M3 - Article in proceedings

SN - 1-4244-1262-5

SP - 756

EP - 759

BT - Proceedings of IEEE Sensors 2007

PB - IEEE

T2 - IEEE Sensors 2007

Y2 - 28 October 2007 through 31 October 2007

ER -