Investigation of Top/bottom Electrode and Diffusion Barrier Layer for PZT thick film MEMS Sensors

Thomas Pedersen, Christian Carstensen Hindrichsen, R. Lou-Møller, Erik Vilain Thomsen

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    In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.
    Original languageEnglish
    Title of host publicationProceedings of IEEE Sensors 2007
    Publication date2007
    ISBN (Print)1-4244-1262-5
    Publication statusPublished - 2007
    Event6th Annual IEEE Conference on Sensors - Atlanta, GA, United States
    Duration: 28 Oct 200731 Oct 2007
    Conference number: 6


    Conference6th Annual IEEE Conference on Sensors
    CountryUnited States
    CityAtlanta, GA
    Internet address

    Bibliographical note

    Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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