Investigation of Top/bottom Electrode and Diffusion Barrier Layer for PZT thick film MEMS Sensors

Thomas Pedersen, Christian Carstensen Hindrichsen, R. Lou-Møller, Erik Vilain Thomsen

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    Abstract

    In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.
    Original languageEnglish
    Title of host publicationProceedings of IEEE Sensors 2007
    PublisherIEEE
    Publication date2007
    Pages756-759
    ISBN (Print)1-4244-1262-5
    DOIs
    Publication statusPublished - 2007
    Event6th Annual IEEE Conference on Sensors - Atlanta, GA, United States
    Duration: 28 Oct 200731 Oct 2007
    Conference number: 6
    http://ewh.ieee.org/conf/sensors2007/

    Conference

    Conference6th Annual IEEE Conference on Sensors
    Number6
    CountryUnited States
    CityAtlanta, GA
    Period28/10/200731/10/2007
    Internet address

    Bibliographical note

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