In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.
|Title of host publication||Proceedings of IEEE Sensors 2007|
|Publication status||Published - 2007|
|Event||6th Annual IEEE Conference on Sensors - Atlanta, GA, United States|
Duration: 28 Oct 2007 → 31 Oct 2007
Conference number: 6
|Conference||6th Annual IEEE Conference on Sensors|
|Period||28/10/2007 → 31/10/2007|