Investigation of PDMS as coating on CMUTs for Imaging

Mette Funding la Cour, Matthias Bo Stuart, Mads Bjerregaard Laursen, Søren Elmin Diederichsen, Erik Vilain Thomsen, Jørgen Arendt Jensen

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    Abstract

    A protective layer is necessary for Capacitive Mi- cromachined Ultrasonic Transducers (CMUTs) to be used for imaging purpose. The layer should both protect the device itself and the patient while maintaining the performance of the device. In this work Sylgard 170 PDMS is tested as coating material for CMUTs through comparison of transmit pressure and receive sensitivity in immersion of coated and uncoated elements. It is seen that the transmitted pressure decreases with 27% and the receive sensitivity decreases 35 % when applying the coating using a dam and fill principle. This matches well with the estimated value of 31 %. With the coating, the center frequency was found to be decreased from 4.5 MHz to 4.1 MHz and the fractional bandwidth was increased from 77 % to 84 % in transmit. In receive the center frequency was found to decrease from 4.4 MHz to 3.9 MHz and the fractional bandwidth was decreased from 108 % to 92 %, when applying the PDMS coating
    Original languageEnglish
    Title of host publicationProceedings of IEEE International Ultrasonics Symposium 2014
    PublisherIEEE
    Publication date2014
    Pages2584-2587
    ISBN (Print)9781479970490
    DOIs
    Publication statusPublished - 2014
    Event2014 IEEE International Ultrasonics Symposium - Hilton Hotel, Chicago, United States
    Duration: 3 Sept 20146 Sept 2014
    https://ieeexplore.ieee.org/xpl/conhome/6917616/proceeding

    Conference

    Conference2014 IEEE International Ultrasonics Symposium
    LocationHilton Hotel
    Country/TerritoryUnited States
    CityChicago
    Period03/09/201406/09/2014
    Internet address

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