Investigation of Negative Ion Production in an Ar/CF4 Matrix-ECR Plasma Source with Transversal Magnetic Filter

Pierre Baele, Mihai Draghici, Eugen Stamate

    Research output: Contribution to conferenceConference abstract for conferenceResearch

    65 Downloads (Pure)
    Original languageEnglish
    Publication date2010
    Publication statusPublished - 2010
    Event63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas - Paris, France
    Duration: 4 Oct 20108 Oct 2010
    http://meetings.aps.org/Meeting/GEC10/APS_epitome

    Conference

    Conference63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
    CountryFrance
    CityParis
    Period04/10/201008/10/2010
    Internet address

    Keywords

    • Plasma processing
    • Fusion energy

    Cite this

    Baele, P., Draghici, M., & Stamate, E. (2010). Investigation of Negative Ion Production in an Ar/CF4 Matrix-ECR Plasma Source with Transversal Magnetic Filter. Abstract from 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, Paris, France.