Abstract
We present an experimental examination of iridium and boron carbide
thin-film coatings for the purpose of fabricating x-ray optics. We use a
combination of x-ray reflectometry and x-ray photoelectron spectroscopy
to model the structure, composition, density, thickness, and
micro-roughness of the thin films. We demonstrate in our analyses how
the two characterization techniques are complementary, and from this we
derive that an overlayer originating from atmospheric contamination with
a thickness between 1.0–1.6 nm is present on the surface. The magnetron
sputtered iridium films are measured to have a density of 22.4g/cm3. The boron carbide film exhibits a change in chemical composition in the top ∼2nm
of the film surface when exposed to the ambient atmosphere. The
chemical reaction occurring on the surface is due to an incorporation of
oxygen and hydrogen present in the ambient atmosphere. Lastly, we
present a correlation between the absorption edges and the emission
lines exhibited by the thin films in an energy range from 50–800 eV and
the impact on the reflectivity performance due to contamination in thin
films.
Original language | English |
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Article number | 10902 |
Journal | Applied Optics |
Volume | 59 |
Issue number | 34 |
Number of pages | 10 |
ISSN | 1559-128X |
DOIs | |
Publication status | Published - 2020 |