| Original language | English |
|---|---|
| Title of host publication | Proceedings of the International Symposium on Plasma Processing XIV Philadelphia |
| Publication date | 2002 |
| Pages | 218-226 |
| Publication status | Published - 2002 |
Inverse Microloading Effect in Reactive Ion Etching of Silicon
Søren Jensen, Ole Hansen
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review