Intrinsically conductive polymer thin film piezoresistors

Michael Lillemose; Martin Spieser; N.O. Christiansen; A. Christensen; Anja Boisen

doi:10.1016/j.mee.2007.12.020

Intrinsically conductive polymer thin film piezoresistors

Michael Lillemose
, Martin Spieser
, N.O. Christiansen
, A. Christensen
, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

We report on the piezoresistive effect in the intrinsically conductive polymer, polyaniline. A process recipe for indirect patterning of thin film polyaniline has been developed. Using a specially designed chip, the polyaniline thin films have been characterised with respect to resistivity and strain sensitivity using two- and four-point measurement method. We have found that polyaniline has a negative gauge factor of K = -4.9, which makes it a candidate for piezoresistive read-out in polymer based MEMS-devices. (C) 2007 Elsevier B.V. All rights reserved.

Original language	English
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
Pages (from-to)	969-971
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2007.12.020
Publication status	Published - 2008

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title = "Intrinsically conductive polymer thin film piezoresistors",

abstract = "We report on the piezoresistive effect in the intrinsically conductive polymer, polyaniline. A process recipe for indirect patterning of thin film polyaniline has been developed. Using a specially designed chip, the polyaniline thin films have been characterised with respect to resistivity and strain sensitivity using two- and four-point measurement method. We have found that polyaniline has a negative gauge factor of K = -4.9, which makes it a candidate for piezoresistive read-out in polymer based MEMS-devices. (C) 2007 Elsevier B.V. All rights reserved.",

author = "Michael Lillemose and Martin Spieser and N.O. Christiansen and A. Christensen and Anja Boisen",

year = "2008",

doi = "10.1016/j.mee.2007.12.020",

language = "English",

volume = "85",

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journal = "Microelectronic Engineering",

issn = "0167-9317",

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TY - JOUR

T1 - Intrinsically conductive polymer thin film piezoresistors

AU - Lillemose, Michael

AU - Spieser, Martin

AU - Christiansen, N.O.

AU - Christensen, A.

AU - Boisen, Anja

PY - 2008

Y1 - 2008

N2 - We report on the piezoresistive effect in the intrinsically conductive polymer, polyaniline. A process recipe for indirect patterning of thin film polyaniline has been developed. Using a specially designed chip, the polyaniline thin films have been characterised with respect to resistivity and strain sensitivity using two- and four-point measurement method. We have found that polyaniline has a negative gauge factor of K = -4.9, which makes it a candidate for piezoresistive read-out in polymer based MEMS-devices. (C) 2007 Elsevier B.V. All rights reserved.

AB - We report on the piezoresistive effect in the intrinsically conductive polymer, polyaniline. A process recipe for indirect patterning of thin film polyaniline has been developed. Using a specially designed chip, the polyaniline thin films have been characterised with respect to resistivity and strain sensitivity using two- and four-point measurement method. We have found that polyaniline has a negative gauge factor of K = -4.9, which makes it a candidate for piezoresistive read-out in polymer based MEMS-devices. (C) 2007 Elsevier B.V. All rights reserved.

U2 - 10.1016/j.mee.2007.12.020

DO - 10.1016/j.mee.2007.12.020

M3 - Journal article

SN - 0167-9317

VL - 85

SP - 969

EP - 971

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

ER -

Intrinsically conductive polymer thin film piezoresistors

Abstract

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