Intrinsically conductive polymer thin film piezoresistors

Michael Lillemose, Martin Spieser, N.O. Christiansen, A. Christensen, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    We report on the piezoresistive effect in the intrinsically conductive polymer, polyaniline. A process recipe for indirect patterning of thin film polyaniline has been developed. Using a specially designed chip, the polyaniline thin films have been characterised with respect to resistivity and strain sensitivity using two- and four-point measurement method. We have found that polyaniline has a negative gauge factor of K = -4.9, which makes it a candidate for piezoresistive read-out in polymer based MEMS-devices. (C) 2007 Elsevier B.V. All rights reserved.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume85
    Issue number5-6
    Pages (from-to)969-971
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2008

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