Intrinsically conductive polymer thin film piezoresistors

Michael Lillemose, Martin Spieser, N.O. Christiansen, A. Christensen, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review


    We report on the piezoresistive effect in the intrinsically conductive polymer, polyaniline. A process recipe for indirect patterning of thin film polyaniline has been developed. Using a specially designed chip, the polyaniline thin films have been characterised with respect to resistivity and strain sensitivity using two- and four-point measurement method. We have found that polyaniline has a negative gauge factor of K = -4.9, which makes it a candidate for piezoresistive read-out in polymer based MEMS-devices. (C) 2007 Elsevier B.V. All rights reserved.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Issue number5-6
    Pages (from-to)969-971
    Publication statusPublished - 2008


    Dive into the research topics of 'Intrinsically conductive polymer thin film piezoresistors'. Together they form a unique fingerprint.

    Cite this