Intrinsic Low Hysteresis Touch Mode Capacitive Pressure Sensor

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Abstract

Hysteresis has always been one of the main concerns when fabricating touch mode capacitive pressure sensors (TMCPS). This phenomenon can be fought at two different levels: during fabrication or after fabrication with the aid of a dedicated signal conditioning circuit. We will describe a microfabrication step that can be introduced in order to reduce drastically the hysteresis of this type of sensors without compromising their sensitivity. Medium-high range (0 to 10 bar absolute pressure) TMCPS with a capacitive signal span of over 100pF and less than 1 % hysteresis in the entire pressure range have been obtained. Temperature characterization was performed and showed a decrease in capacitance as the temperature increases. The maximum output variation, relative to room temperature, has been found to be 0.15 %/°C at 80 °C, while an almost constant variation of 0.044 %/°C is achieved if working in the touch mode region.
Original languageEnglish
Title of host publicationIEEE Sensors 2010
PublisherIEEE
Publication date2011
Pages2279-2282
ISBN (Print)978-1-4244-8170-5
ISBN (Electronic)978-1-4244-8168-2
DOIs
Publication statusPublished - 2011
Event2010 IEEE Sensors - Chicago, IL, United States
Duration: 1 Nov 20104 Nov 2010
http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=5678851

Conference

Conference2010 IEEE Sensors
CountryUnited States
CityChicago, IL
Period01/11/201004/11/2010
Internet address

Keywords

  • Capacitive sensors
  • Pressure sensors
  • Microfabrication

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