Interfacial structures of bonded Si wafers

R. Feidenhans'l

    Research output: Contribution to conference › Conference abstract for conference › Research

    Original languageEnglish
    Publication date1999
    Publication statusPublished - 1999
    EventSixth International Conference on Surface X-ray and Neutron Scattering - Noordwijkerhout, Netherlands
    Duration: 13 Sept 1999 → 17 Sept 1999

    Conference

    ConferenceSixth International Conference on Surface X-ray and Neutron Scattering
    Country/TerritoryNetherlands
    CityNoordwijkerhout
    Period13/09/1999 → 17/09/1999

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