Interfacial structures of bonded Si wafers

R. Feidenhans'l, M. Nielsen, P.B. Howes, S. Weichert, F. Grey, J. Vedde

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research

Original language	English
Title of host publication	Collected abstracts
Number of pages	51
Place of Publication	Glasgow
Publisher	International Union of Crystallography
Publication date	1999
Publication status	Published - 1999
Event	18th IUCr Congress and General Assembly - Glasgow, United Kingdom Duration: 4 Aug 1999 → 13 Aug 1999 Conference number: 18 http://ww1.iucr.org/cong/18/index.html

Conference	18th IUCr Congress and General Assembly
Number	18
Country/Territory	United Kingdom
City	Glasgow
Period	04/08/1999 → 13/08/1999
Internet address	http://ww1.iucr.org/cong/18/index.html

OpenUrl availability

@inbook{462428aea711443986f78eb9162071ba,

title = "Interfacial structures of bonded Si wafers",

keywords = "Nye funktionelle materialer",

author = "R. Feidenhans'l and M. Nielsen and P.B. Howes and S. Weichert and F. Grey and J. Vedde",

year = "1999",

language = "English",

booktitle = "Collected abstracts",

publisher = "International Union of Crystallography",

note = "18th IUCr Congress and General Assembly, IUCR99 ; Conference date: 04-08-1999 Through 13-08-1999",

url = "http://ww1.iucr.org/cong/18/index.html",

}

TY - ABST

T1 - Interfacial structures of bonded Si wafers

AU - Feidenhans'l, R.

AU - Nielsen, M.

AU - Howes, P.B.

AU - Weichert, S.

AU - Grey, F.

AU - Vedde, J.

N1 - Conference code: 18

PY - 1999

Y1 - 1999

KW - Nye funktionelle materialer

M3 - Conference abstract in proceedings

BT - Collected abstracts

PB - International Union of Crystallography

CY - Glasgow

T2 - 18th IUCr Congress and General Assembly

Y2 - 4 August 1999 through 13 August 1999

ER -