Interfacial structures of bonded Si wafers

R. Feidenhans'l, M. Nielsen, P.B. Howes, S. Weichert, F. Grey, J. Vedde

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearch

    Original languageEnglish
    Title of host publicationCollected abstracts
    Number of pages51
    Place of PublicationGlasgow
    PublisherInternational Union of Crystallography
    Publication date1999
    Publication statusPublished - 1999
    Event18th IUCr Congress and General Assembly - Glasgow, United Kingdom
    Duration: 4 Aug 199913 Aug 1999
    Conference number: 18
    http://ww1.iucr.org/cong/18/index.html

    Conference

    Conference18th IUCr Congress and General Assembly
    Number18
    CountryUnited Kingdom
    CityGlasgow
    Period04/08/199913/08/1999
    Internet address

    Cite this

    Feidenhans'l, R., Nielsen, M., Howes, P. B., Weichert, S., Grey, F., & Vedde, J. (1999). Interfacial structures of bonded Si wafers. In Collected abstracts International Union of Crystallography.