Interfacial structures of bonded Si wafers

R. Feidenhans'l, M. Nielsen, P.B. Howes, S. Weichert, F. Grey, J. Vedde

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearch

    Original languageEnglish
    Title of host publicationCollected abstracts
    Number of pages51
    Place of PublicationGlasgow
    PublisherInternational Union of Crystallography
    Publication date1999
    Publication statusPublished - 1999
    Event18th IUCr Congress and General Assembly - Glasgow, United Kingdom
    Duration: 4 Aug 199913 Aug 1999
    Conference number: 18


    Conference18th IUCr Congress and General Assembly
    Country/TerritoryUnited Kingdom
    Internet address

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