Interfacial structures of bonded Si wafers

R. Feidenhans'l

    Research output: Contribution to conferenceConference abstract for conferenceResearch

    Original languageEnglish
    Publication date1999
    Publication statusPublished - 1999
    Event6. International conference on surface X-ray and neutron scattering (6SXNS) - Noordwijkerhout (NL), 13-17 Sep
    Duration: 1 Jan 1999 → …

    Conference

    Conference6. International conference on surface X-ray and neutron scattering (6SXNS)
    CityNoordwijkerhout (NL), 13-17 Sep
    Period01/01/1999 → …

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