Interface losses in multimaterial resonators

L.G. Villanueva, B. Amato, Tom Larsen, Silvan Schmid

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize the 81 lowest out-of-plane flexural vibrational modes to achieve a total of more than 3000 experimental points that allow us to quantify the contribution of surface and volume intrinsic (material related) losses in MEMS resonators. We conclude that the losses in the interface between silicon nitride and aluminum is a very important contributor to the overall energy loss.
    Original languageEnglish
    Title of host publication2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
    PublisherIEEE
    Publication date2014
    Pages632 - 635
    ISBN (Print)9781479935093
    DOIs
    Publication statusPublished - 2014
    Event2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Fransisco, United States
    Duration: 26 Jan 201430 Jan 2014
    Conference number: 27

    Conference

    Conference2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
    Number27
    CountryUnited States
    CitySan Fransisco
    Period26/01/201430/01/2014

    Keywords

    • Fields, Waves and Electromagnetics

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