Interface losses in multimaterial resonators

L.G. Villanueva; B. Amato; Tom Larsen; Silvan Schmid

doi:10.1109/MEMSYS.2014.6765720

Interface losses in multimaterial resonators

L.G. Villanueva, B. Amato, Tom Larsen, Silvan Schmid

Technical University of Denmark

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize the 81 lowest out-of-plane flexural vibrational modes to achieve a total of more than 3000 experimental points that allow us to quantify the contribution of surface and volume intrinsic (material related) losses in MEMS resonators. We conclude that the losses in the interface between silicon nitride and aluminum is a very important contributor to the overall energy loss.

Original language	English
Title of host publication	2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Publication date	2014
Pages	632 - 635
ISBN (Print)	9781479935093
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765720
Publication status	Published - 2014
Event	2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Fransisco, United States Duration: 26 Jan 2014 → 30 Jan 2014 Conference number: 27

Conference

Conference	2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Number	27
Country/Territory	United States
City	San Fransisco
Period	26/01/2014 → 30/01/2014

Keywords

Fields, Waves and Electromagnetics

Access to Document

10.1109/MEMSYS.2014.6765720

OpenUrl availability

Full text

Cite this

@inproceedings{5f3830e7dd1c4d9287ad25bcf803f880,

title = "Interface losses in multimaterial resonators",

abstract = "We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize the 81 lowest out-of-plane flexural vibrational modes to achieve a total of more than 3000 experimental points that allow us to quantify the contribution of surface and volume intrinsic (material related) losses in MEMS resonators. We conclude that the losses in the interface between silicon nitride and aluminum is a very important contributor to the overall energy loss.",

keywords = "Fields, Waves and Electromagnetics",

author = "L.G. Villanueva and B. Amato and Tom Larsen and Silvan Schmid",

year = "2014",

doi = "10.1109/MEMSYS.2014.6765720",

language = "English",

isbn = "9781479935093",

pages = "632 -- 635",

booktitle = "2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

note = "2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 26-01-2014 Through 30-01-2014",

}

Villanueva, LG, Amato, B, Larsen, T & Schmid, S 2014, Interface losses in multimaterial resonators. in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, pp. 632 - 635, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), San Fransisco, United States, 26/01/2014. https://doi.org/10.1109/MEMSYS.2014.6765720

TY - GEN

T1 - Interface losses in multimaterial resonators

AU - Villanueva, L.G.

AU - Amato, B.

AU - Larsen, Tom

AU - Schmid, Silvan

N1 - Conference code: 27

PY - 2014

Y1 - 2014

N2 - We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize the 81 lowest out-of-plane flexural vibrational modes to achieve a total of more than 3000 experimental points that allow us to quantify the contribution of surface and volume intrinsic (material related) losses in MEMS resonators. We conclude that the losses in the interface between silicon nitride and aluminum is a very important contributor to the overall energy loss.

AB - We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize the 81 lowest out-of-plane flexural vibrational modes to achieve a total of more than 3000 experimental points that allow us to quantify the contribution of surface and volume intrinsic (material related) losses in MEMS resonators. We conclude that the losses in the interface between silicon nitride and aluminum is a very important contributor to the overall energy loss.

KW - Fields, Waves and Electromagnetics

U2 - 10.1109/MEMSYS.2014.6765720

DO - 10.1109/MEMSYS.2014.6765720

M3 - Article in proceedings

SN - 9781479935093

SP - 632

EP - 635

BT - 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

PB - IEEE

T2 - 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 26 January 2014 through 30 January 2014

ER -

Interface losses in multimaterial resonators

Abstract

Conference

Keywords

Access to Document

OpenUrl availability

Fingerprint

Cite this