@inproceedings{53204cbfb10046b69e958e09104dd6e4,
title = "Integrated packaging concept for an intelligent transducer",
author = "Matthias Heschel and Kuhmann, {Jochen Friedrich} and Siebe Bouwstra and M. Amskov",
year = "1999",
language = "English",
pages = "344--52",
booktitle = "Integrated packaging concept for an intelligent transducer",
publisher = "SPIE",
address = "United States",
note = "5th Annual International Symposium on Smart Structures and Materials ; Conference date: 01-03-1998 Through 05-03-1998",
}