Integrated optical readout for miniaturization of cantilever-based sensor system

Maria Nordström, Dan Zauner, Montserrat Calleja, Jörg Hübner, Anja Boisen

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    The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.
    Original languageEnglish
    JournalApplied Physics Letters
    Issue number10
    Pages (from-to)103512
    Publication statusPublished - 2007

    Bibliographical note

    Copyright (2007) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.


    • SU-8 POLYMER


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