Integrated optical  readout for miniaturization  of cantilever-based  sensor system

Maria Nordström; Dan Zauner; Montserrat Calleja; Jörg Hübner; Anja Boisen

doi:10.1063/1.2779851

Integrated optical readout for miniaturization of cantilever-based sensor system

Maria Nordström, Dan Zauner, Montserrat Calleja, Jörg Hübner, Anja Boisen

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Abstract

The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.

Original language	English
Journal	Applied Physics Letters
Volume	91
Issue number	10
Pages (from-to)	103512
ISSN	0003-6951
DOIs	https://doi.org/10.1063/1.2779851
Publication status	Published - 2007

Bibliographical note

Copyright (2007) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

Keywords

SU-8 POLYMER
NANOMECHANICAL BIOSENSORS
WAVE-GUIDES

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10.1063/1.2779851

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http://link.aip.org/link/APPLAB/v91/i10/p103512/s1

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Cite this

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abstract = "The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.",

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AU - Boisen, Anja

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