Integrated design of MEMS

Arnaud De Grave, Daniel Brissaud

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Emerging technologies of Micro-Electromechanical Systems (MEMS) are applications such as airbag accelerometers. Micro-products present many physical differences from macro-products. Moreover, there is a high level of integration in multiple fields of physics with strongly coupled effects. Manufacturing is mainly coming from the silicon industry. Our interest is to highlight the differences between designing MEMS and designing classical ICs or mechanical devices, to propose new methods and aided-tools supporting the design process. Our methodology is based on an ethnographic approach through industrial immersion to propose a socio-technological description of the design process and MEMS design tools.
    Original languageEnglish
    JournalJournal of Design Research
    Volume05
    Issue number04
    Pages (from-to)416-434
    DOIs
    Publication statusPublished - 2007

    Keywords

    • MEMS design flow
    • sociotechnical ethnography study

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