Integrated design of MEMS

Emerging technologies of Micro-Electromechanical Systems (MEMS) are applications such as airbag accelerometers. Micro-products present many physical differences from macro-products. Moreover, there is a high level of integration in multiple fields of physics with strongly coupled effects. Manufacturing is mainly coming from the silicon industry. Our interest is to highlight the differences between designing MEMS and designing classical ICs or mechanical devices, to propose new methods and aided-tools supporting the design process. Our methodology is based on an ethnographic approach through industrial immersion to propose a socio-technological description of the design process and MEMS design tools.