@inproceedings{3c1e4a32545748149ecea9a11aa08cb3,
title = "Installation and commissioning of the silicon pore optics coating facility for the ATHENA mission",
abstract = "We present the latest progress on the industrial scale coating facility for the Advanced Telescope for High-ENergy Astrophysics (ATHENA) mission. The facility has been successfully commissioned and tested, completing an important milestone in preparation of the Silicon Pore Optics (SPO) production capability. We qualified the coating facility by depositing iridium and boron carbide thin films in different configurations under various process conditions including pre-coating in-system plasma cleaning. The thin films were characterized with X-Ray Reectometry (XRR) using laboratory X-ray sources Cu K-α at 8.048 keV and PTB's four-crystal monochromator beamline at the synchrotron radiation facility BESSY II in the energy range from 3.6 keV to 10.0 keV. Additional X-ray Photoelectron Spectroscopy (XPS) measurements were performed with Al K-α radiation to analyze the composition of the deposited thin films.",
author = "S. Massahi and Christensen, {F. E.} and Ferreira, {D. D. MDella Monica F} and A. Jafari and S. Svendsen and Henriksen, {P. L.} and B. Shortt and I. Ferreira and M. Bavdaz and M. Collon and B. Landgraf and D.A. Girou and A. Langer and W. Sch{\"o}nberger and T. Wellner and M. Krumrey and L. Cibik",
year = "2019",
doi = "10.1117/12.2528351",
language = "English",
volume = "11119",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE - International Society for Optical Engineering",
editor = "O'Dell, {Stephen L.} and Giovanni Pareschi",
booktitle = "Proceedings of SPIE 11119, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX",
note = "SPIE Optical Engineering + Applications 2019, Optics + Photonics 2019 ; Conference date: 11-08-2019 Through 15-08-2019",
}