Injection Molding of High Aspect Ratio Nanostructures

Maria Matschuk, Niels Bent Larsen

    Research output: Contribution to conferencePosterResearchpeer-review

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    We present a process for injection molding of 40 nm wide and >100 nm high pillars (pitch: 200 nm). We explored the effects of mold coatings and injection molding conditions on the replication quality of nanostructures in cyclic olefin copolymer. We found that optimization of molding parameters using native nickel molds only lead to slight improvements in replication quality. In contrast, a fluorocarbon based antistiction coating (FDTS) was found to improve the replication quality significantly.
    Original languageEnglish
    Publication date2011
    Publication statusPublished - 2011
    Event37th International Conference on Micro and Nano Engineering - Berlin, Germany
    Duration: 19 Sept 201123 Sept 2011
    Conference number: 37


    Conference37th International Conference on Micro and Nano Engineering
    Internet address


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