Abstract
We present a process for injection molding of 40 nm wide and >100 nm
high pillars (pitch: 200 nm). We explored the effects of mold coatings and
injection molding conditions on the replication quality of nanostructures in
cyclic olefin copolymer. We found that optimization of molding parameters
using native nickel molds only lead to slight improvements in replication
quality. In contrast, a fluorocarbon based antistiction coating (FDTS) was
found to improve the replication quality significantly.
| Original language | English |
|---|---|
| Publication date | 2011 |
| Publication status | Published - 2011 |
| Event | 37th International Conference on Micro and Nano Engineering - Berlin, Germany Duration: 19 Sept 2011 → 23 Sept 2011 Conference number: 37 http://www.mne-conf.org/GENERAL/index.php |
Conference
| Conference | 37th International Conference on Micro and Nano Engineering |
|---|---|
| Number | 37 |
| Country/Territory | Germany |
| City | Berlin |
| Period | 19/09/2011 → 23/09/2011 |
| Internet address |