Injection Molding of High Aspect Ratio Nanostructures

Maria Matschuk, Niels Bent Larsen

    Research output: Contribution to conferencePosterResearchpeer-review

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    Abstract

    We present a process for injection molding of 40 nm wide and >100 nm high pillars (pitch: 200 nm). We explored the effects of mold coatings and injection molding conditions on the replication quality of nanostructures in cyclic olefin copolymer. We found that optimization of molding parameters using native nickel molds only lead to slight improvements in replication quality. In contrast, a fluorocarbon based antistiction coating (FDTS) was found to improve the replication quality significantly.
    Original languageEnglish
    Publication date2011
    Publication statusPublished - 2011
    Event37th International Conference on Micro and Nano Engineering - Berlin, Germany
    Duration: 19 Sep 201123 Sep 2011
    Conference number: 37
    http://www.mne-conf.org/GENERAL/index.php

    Conference

    Conference37th International Conference on Micro and Nano Engineering
    Number37
    Country/TerritoryGermany
    CityBerlin
    Period19/09/201123/09/2011
    Internet address

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