We present a process for injection molding of 40 nm wide and >100 nm high pillars (pitch: 200 nm). We explored the effects of mold coatings and injection molding conditions on the replication quality of nanostructures in cyclic olefin copolymer. We found that optimization of molding parameters using native nickel molds only lead to slight improvements in replication quality. In contrast, a fluorocarbon based antistiction coating (FDTS) was found to improve the replication quality significantly.
|Publication status||Published - 2011|
|Event||37th International Conference on Micro and Nano Engineering - Berlin, Germany|
Duration: 19 Sep 2011 → 23 Sep 2011
Conference number: 37
|Conference||37th International Conference on Micro and Nano Engineering|
|Period||19/09/2011 → 23/09/2011|