Injection molded polymeric hard X-ray lenses

Frederik Stöhr, Hugh Simons, Anders Clemen Jakobsen, Claus Højgård Nielsen, Jonas Michael-Lindhard, Flemming Jensen, Henning Friis Poulsen, Ole Hansen, Jörg Hübner

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A novel and economical approach for fabricating compound refractive lenses for the purpose of focusing hard X-rays is described. A silicon master was manufactured by UV-lithography and deep reactive ion etching (DRIE). Sacrificial structures were utilized, which enabled accurate control of the etching profile and were removed after DRIE. By electroplating, an inverse nickel sample was obtained, which was used as a mold insert in a commercial polymer injection molding machine. A prototype lens made of polyethylene with a focal length of 350 mm was tested using synchrotron radiation at photon energies of 17 keV. A 55 µm long line focus with a minimal waist of 770 nm (FWHM) and a total lens transmittance of 32% were measured. Due to its suitability for cheap mass production, this highly efficient optics may find widespread use in hard X-ray instruments.
Original languageEnglish
JournalOptical Materials Express
Issue number12
Pages (from-to)2804-2811
Publication statusPublished - 2015


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