Injection and injection-compression moulding replication capability for the production of polymer lab-on-a-chip with nano structures

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    Abstract

    The manufacturing precision and accuracy in the production of polymer lab-on-a-chip components with 100-130 nm deep nanochannels are evaluated using a metrological approach. Replication fidelity on corresponding process fingerprint test nanostructures over different substrates (nickel tool and polymer part) is quantified through traceable atomic force microscope measurements. Dimensions of injection moulded (IM) and injection-compression moulded (ICM) thermoplastic cyclic olefin copolymer nanofeatures are characterized depending on process parameters and four different features positions on a 30 × 80 mm2 area. Replication capability of IM and ICM technologies are quantified and the products tolerance at the nanometre dimensional scale verified.

    Original languageEnglish
    Article number105001
    JournalJournal of Micromechanics and Microengineering
    Volume27
    Issue number10
    Number of pages10
    ISSN0960-1317
    DOIs
    Publication statusPublished - 2017

    Keywords

    • Cyclic olefin copolymer
    • Metrology
    • Microfluidic polymer systems
    • Nanostructures
    • Precision molding

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