Abstract
The manufacturing precision and accuracy in the production of polymer lab-on-a-chip components with 100-130 nm deep nanochannels are evaluated using a metrological approach. Replication fidelity on corresponding process fingerprint test nanostructures over different substrates (nickel tool and polymer part) is quantified through traceable atomic force microscope measurements. Dimensions of injection moulded (IM) and injection-compression moulded (ICM) thermoplastic cyclic olefin copolymer nanofeatures are characterized depending on process parameters and four different features positions on a 30 × 80 mm2 area. Replication capability of IM and ICM technologies are quantified and the products tolerance at the nanometre dimensional scale verified.
Original language | English |
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Article number | 105001 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 27 |
Issue number | 10 |
Number of pages | 10 |
ISSN | 0960-1317 |
DOIs | |
Publication status | Published - 2017 |
Keywords
- Cyclic olefin copolymer
- Metrology
- Microfluidic polymer systems
- Nanostructures
- Precision molding