Influence of surface condition in Langmuir probe measurements

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The surrounding sheath focuses the charged particles to distinct parts of the probe surface resulting in nonuniform physical and/or chemical properties. Then, after a time interval dependent of the
degree of plasma contamination, this process results in well-defined regions with different work functions that shape the probe characteristic leading to erroneous measurement of plasma temperature and ion density. For Ar/O2 and Ar/SF6 plasmas produced within a multipolar magnetically confined device we investigated bombardment by positive or negative charges and indirect heating to modify the surface of a planar probe. © 2002 American Vacuum Society.
Original languageEnglish
JournalJournal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
Pages (from-to)661-666
Publication statusPublished - 2002
Externally publishedYes


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