Influence of measuring parameters on the accuracy of atomic force microscope in industrial applications

Guido Tosello, Andrea Antico, Hans Nørgaard Hansen, Francesco Marinello, Giovanni Lucchetta

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

Atomic Force Microscopy (AFM) is a powerful technique providing 3D surface topographies with very high resolution in both lateral and vertical direction. Thanks to its relatively easy use, AFM can be well introduced in process control, gaining great advantage in research as well as in the evaluation of final product characteristics. The paper considers quantitative application of AFM measurements for industrial applications. In particular the influence and subsequent optimization of scanning parameters on the precision of AFM maps is discussed, with particular attention to scan speed and interaction force when measuring a one-dimensional grating with triangular profile. The aim is then maximization of information from collected data and minimization of measurement variability and scan time. Optimized scan setting is then applied to measure surface defects of micro injection moulded components. Results show the detrimental effect of high speed on the measurement of deep valleys as well as the effect of force on vertical measurements accuracy. Horizontal measurements were also performed, highlighting the prevailing effect of scan speed.
Original languageEnglish
Title of host publicationProceedings of the 5th International Conference on Multi-Material Micro Manufacture (4M/ICOMM 2009)
Publication date2009
Pages401-406
Publication statusPublished - 2009
EventInternational Conference on Multi-Material Micro-Manufacture(4M) and the International Conference on Micro-Manufacture (ICOMM) - Karlsruhe, Germany
Duration: 23 Sep 200925 Sep 2009
Conference number: 5th
http://www.4m-association.org/conference/2009

Conference

ConferenceInternational Conference on Multi-Material Micro-Manufacture(4M) and the International Conference on Micro-Manufacture (ICOMM)
Number5th
CountryGermany
CityKarlsruhe
Period23/09/200925/09/2009
Internet address

Keywords

  • Atomic force microscope
  • Measuring parameters

Cite this

Tosello, G., Antico, A., Hansen, H. N., Marinello, F., & Lucchetta, G. (2009). Influence of measuring parameters on the accuracy of atomic force microscope in industrial applications. In Proceedings of the 5th International Conference on Multi-Material Micro Manufacture (4M/ICOMM 2009) (pp. 401-406)