Abstract
Atomic Force Microscopy (AFM) is a powerful technique providing 3D surface topographies with very high resolution in both lateral and vertical direction. Thanks to its relatively easy use, AFM can be well introduced in process control, gaining great advantage in research as well as in the evaluation of final product characteristics. The paper considers quantitative application of AFM measurements for industrial applications. In particular the influence and subsequent optimization of scanning parameters on the precision of AFM maps is discussed, with particular attention to scan speed and interaction force when measuring a one-dimensional grating with triangular profile. The aim is then maximization of information from collected data and minimization of measurement variability and scan time. Optimized scan setting is then applied to measure surface defects of micro injection moulded components. Results show the detrimental effect of high speed on the measurement of deep valleys as well as the effect of force on vertical measurements accuracy. Horizontal measurements were also performed, highlighting the prevailing effect of scan speed.
Original language | English |
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Title of host publication | Proceedings of the 5th International Conference on Multi-Material Micro Manufacture (4M/ICOMM 2009) |
Publication date | 2009 |
Pages | 401-406 |
Publication status | Published - 2009 |
Event | International Conference on Multi-Material Micro-Manufacture(4M) and the International Conference on Micro-Manufacture (ICOMM) - Karlsruhe, Germany Duration: 23 Sept 2009 → 25 Sept 2009 Conference number: 5th http://www.4m-association.org/conference/2009 |
Conference
Conference | International Conference on Multi-Material Micro-Manufacture(4M) and the International Conference on Micro-Manufacture (ICOMM) |
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Number | 5th |
Country/Territory | Germany |
City | Karlsruhe |
Period | 23/09/2009 → 25/09/2009 |
Internet address |
Keywords
- Atomic force microscope
- Measuring parameters