Industrial characterization of nano-scale roughness on polished surfaces

Research output: Contribution to journalConference article – Annual report year: 2015Researchpeer-review

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We report a correlation between the scattering value “Aq” and the ISO standardized roughness parameter Rq. The Aq value is a measure for surface smoothness, and can easily be determined from an optical scattering measurement. The correlation equation extrapolates the Aq value from a narrow measurement range of ±16° from specular to a broader range of ±80°, corresponding to spatial surface wavelengths of 0.8 μm to 25 μm, and converts the Aq value to the Rq value for the surface.
Furthermore, we present an investigation of the changes in scattering intensities, when a surface is covered with a thin liquid film. It is shown that the changes in the angular scattering intensities can be compensated for the liquid film, using empirically determined relations. This allows a restoration of the “true” scattering intensities which would be measured from a corresponding clean surface. The compensated scattering intensities provide Aq values within 5.7 % ± 6.1 % compared to the measurements on clean surfaces.
Original languageEnglish
JournalProceedings of SPIE, the International Society for Optical Engineering
Number of pages8
Publication statusPublished - 2015
EventOptifab 2015 - Rochester, NY, United States
Duration: 12 Oct 201515 Oct 2015


ConferenceOptifab 2015
CountryUnited States
CityRochester, NY
CitationsWeb of Science® Times Cited: No match on DOI

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ID: 118542703