Industrial characterization of nano-scale roughness on polished surfaces

Nikolaj Agentoft Feidenhans'l, Poul-Erik Hansen, Lukas Pilny, Morten H. Madsen, Giuliano Bissacco, Jan C. Petersen, Rafael J. Taboryski

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Abstract

We report a correlation between the scattering value “Aq” and the ISO standardized roughness parameter Rq. The Aq value is a measure for surface smoothness, and can easily be determined from an optical scattering measurement. The correlation equation extrapolates the Aq value from a narrow measurement range of ±16° from specular to a broader range of ±80°, corresponding to spatial surface wavelengths of 0.8 μm to 25 μm, and converts the Aq value to the Rq value for the surface.
Furthermore, we present an investigation of the changes in scattering intensities, when a surface is covered with a thin liquid film. It is shown that the changes in the angular scattering intensities can be compensated for the liquid film, using empirically determined relations. This allows a restoration of the “true” scattering intensities which would be measured from a corresponding clean surface. The compensated scattering intensities provide Aq values within 5.7 % ± 6.1 % compared to the measurements on clean surfaces.
Original languageEnglish
JournalProceedings of SPIE, the International Society for Optical Engineering
Volume9633
Number of pages8
ISSN0277-786X
DOIs
Publication statusPublished - 2015
EventOptifab 2015 - Rochester, NY, United States
Duration: 12 Oct 201515 Oct 2015

Conference

ConferenceOptifab 2015
CountryUnited States
CityRochester, NY
Period12/10/201515/10/2015

Cite this

Feidenhans'l, Nikolaj Agentoft ; Hansen, Poul-Erik ; Pilny, Lukas ; Madsen, Morten H. ; Bissacco, Giuliano ; Petersen, Jan C. ; Taboryski, Rafael J. / Industrial characterization of nano-scale roughness on polished surfaces. In: Proceedings of SPIE, the International Society for Optical Engineering. 2015 ; Vol. 9633.
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title = "Industrial characterization of nano-scale roughness on polished surfaces",
abstract = "We report a correlation between the scattering value “Aq” and the ISO standardized roughness parameter Rq. The Aq value is a measure for surface smoothness, and can easily be determined from an optical scattering measurement. The correlation equation extrapolates the Aq value from a narrow measurement range of ±16° from specular to a broader range of ±80°, corresponding to spatial surface wavelengths of 0.8 μm to 25 μm, and converts the Aq value to the Rq value for the surface. Furthermore, we present an investigation of the changes in scattering intensities, when a surface is covered with a thin liquid film. It is shown that the changes in the angular scattering intensities can be compensated for the liquid film, using empirically determined relations. This allows a restoration of the “true” scattering intensities which would be measured from a corresponding clean surface. The compensated scattering intensities provide Aq values within 5.7 {\%} ± 6.1 {\%} compared to the measurements on clean surfaces.",
author = "Feidenhans'l, {Nikolaj Agentoft} and Poul-Erik Hansen and Lukas Pilny and Madsen, {Morten H.} and Giuliano Bissacco and Petersen, {Jan C.} and Taboryski, {Rafael J.}",
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Industrial characterization of nano-scale roughness on polished surfaces. / Feidenhans'l, Nikolaj Agentoft; Hansen, Poul-Erik; Pilny, Lukas; Madsen, Morten H.; Bissacco, Giuliano; Petersen, Jan C.; Taboryski, Rafael J.

In: Proceedings of SPIE, the International Society for Optical Engineering, Vol. 9633, 2015.

Research output: Contribution to journalConference articleResearchpeer-review

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AU - Feidenhans'l, Nikolaj Agentoft

AU - Hansen, Poul-Erik

AU - Pilny, Lukas

AU - Madsen, Morten H.

AU - Bissacco, Giuliano

AU - Petersen, Jan C.

AU - Taboryski, Rafael J.

PY - 2015

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N2 - We report a correlation between the scattering value “Aq” and the ISO standardized roughness parameter Rq. The Aq value is a measure for surface smoothness, and can easily be determined from an optical scattering measurement. The correlation equation extrapolates the Aq value from a narrow measurement range of ±16° from specular to a broader range of ±80°, corresponding to spatial surface wavelengths of 0.8 μm to 25 μm, and converts the Aq value to the Rq value for the surface. Furthermore, we present an investigation of the changes in scattering intensities, when a surface is covered with a thin liquid film. It is shown that the changes in the angular scattering intensities can be compensated for the liquid film, using empirically determined relations. This allows a restoration of the “true” scattering intensities which would be measured from a corresponding clean surface. The compensated scattering intensities provide Aq values within 5.7 % ± 6.1 % compared to the measurements on clean surfaces.

AB - We report a correlation between the scattering value “Aq” and the ISO standardized roughness parameter Rq. The Aq value is a measure for surface smoothness, and can easily be determined from an optical scattering measurement. The correlation equation extrapolates the Aq value from a narrow measurement range of ±16° from specular to a broader range of ±80°, corresponding to spatial surface wavelengths of 0.8 μm to 25 μm, and converts the Aq value to the Rq value for the surface. Furthermore, we present an investigation of the changes in scattering intensities, when a surface is covered with a thin liquid film. It is shown that the changes in the angular scattering intensities can be compensated for the liquid film, using empirically determined relations. This allows a restoration of the “true” scattering intensities which would be measured from a corresponding clean surface. The compensated scattering intensities provide Aq values within 5.7 % ± 6.1 % compared to the measurements on clean surfaces.

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