Industrial characterization of nano-scale roughness on polished surfaces

Nikolaj Agentoft Feidenhans'l, Poul-Erik Hansen, Lukas Pilny, Morten H. Madsen, Giuliano Bissacco, Jan C. Petersen, Rafael J. Taboryski

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    We report a correlation between the scattering value “Aq” and the ISO standardized roughness parameter Rq. The Aq value is a measure for surface smoothness, and can easily be determined from an optical scattering measurement. The correlation equation extrapolates the Aq value from a narrow measurement range of ±16° from specular to a broader range of ±80°, corresponding to spatial surface wavelengths of 0.8 μm to 25 μm, and converts the Aq value to the Rq value for the surface.
    Furthermore, we present an investigation of the changes in scattering intensities, when a surface is covered with a thin liquid film. It is shown that the changes in the angular scattering intensities can be compensated for the liquid film, using empirically determined relations. This allows a restoration of the “true” scattering intensities which would be measured from a corresponding clean surface. The compensated scattering intensities provide Aq values within 5.7 % ± 6.1 % compared to the measurements on clean surfaces.
    Original languageEnglish
    JournalProceedings of SPIE - The International Society for Optical Engineering
    Number of pages8
    Publication statusPublished - 2015
    EventOptifab 2015 - Rochester, NY, United States
    Duration: 12 Oct 201515 Oct 2015


    ConferenceOptifab 2015
    Country/TerritoryUnited States
    CityRochester, NY


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