Projects per year
| Original language | English |
|---|
| Place of Publication | Kgs. Lyngby, Denmark |
|---|---|
| Publisher | Technical University of Denmark |
| Number of pages | 125 |
| Publication status | Published - 2004 |
Projects
- 1 Finished
-
Inductively Coupled Plasma Etching for Microsystems
Jensen, S. (PhD Student), Hübner, J. (Examiner), Christensen, C. (Examiner), Franssila, S. A. (Examiner) & Hansen, O. (Main Supervisor)
01/04/2001 → 22/09/2004
Project: PhD
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