Indirect tip fabrication for scanning probe microscopy

Anja Boisen, Jan Pihl Rasmussen, Ole Hansen, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume30
    Pages (from-to)579-582
    ISSN0167-9317
    Publication statusPublished - 1996

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