Increased mechanical robustness of piezoelectric magnetoelastic vibrational energy harvesters

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This work presents a cantilever based broadband piezoelectric magnetoelastic vibration energy harvester with increased mechanical robustness. The energy harvester is fabricated using KOH etching to define the cantilever and the proof mass is made using micromachined Fe foils which together with a pair of miniature magnets provides the magnetoelastic properties. KOH etching leads to very sharp corners at the anchoring point of the cantilever which makes the cantilever fragile. The mechanical robustness of the energy harvesters is increased using a lithography-free two-step fabrication process where a thermal oxidation is used for corner rounding. The corner rounding at the anchoring point lowers the stress concentration and thereby increases the robustness of the device. The radius of curvature for the corner depends linearly on the thickness of the oxide. Both enhanced and non-enhanced beams are excited at increasing frame accelerations. The conventional beams break at frame accelerations of around 3 g while the enhanced break at almost twice as much, 5.7 g. The devices are characterized electrically by impedance measurements in both their linear and non linear regime. The magnetoelastic behaviour can be adjusted by varying the beam-magnet distance which allows for both spring softening and spring hardening.
Original languageEnglish
JournalMicroelectronic Engineering
Volume207
Pages (from-to)19-26
ISSN0167-9317
DOIs
Publication statusPublished - 2019
CitationsWeb of Science® Times Cited: No match on DOI

    Research areas

  • Ambient vibration, Energy harvester, Magnetoelastic, MEMS, Piezelectric, Robust

ID: 166656053