Increase of maximum detectable slope with optical profilers: theory and applicative examples,

Francesco Marinello, Paolo Bariani, S. Carmignato, E. Savio, Leonardo De Chiffre, M. Bossard

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProc. Int. euspen Conf.
    Publication date2007
    Publication statusPublished - 2007
    Event7th International Conference of the European Society for Precision Engineering and Nanotechnology - Bremen, Germany
    Duration: 20 May 200724 May 2007
    Conference number: 7

    Conference

    Conference7th International Conference of the European Society for Precision Engineering and Nanotechnology
    Number7
    CountryGermany
    CityBremen
    Period20/05/200724/05/2007

    Cite this

    Marinello, F., Bariani, P., Carmignato, S., Savio, E., De Chiffre, L., & Bossard, M. (2007). Increase of maximum detectable slope with optical profilers: theory and applicative examples, In Proc. Int. euspen Conf.
    Marinello, Francesco ; Bariani, Paolo ; Carmignato, S. ; Savio, E. ; De Chiffre, Leonardo ; Bossard, M. / Increase of maximum detectable slope with optical profilers: theory and applicative examples,. Proc. Int. euspen Conf.. 2007.
    @inproceedings{c09b9ed74da046a08e33fff6a797d31f,
    title = "Increase of maximum detectable slope with optical profilers: theory and applicative examples,",
    author = "Francesco Marinello and Paolo Bariani and S. Carmignato and E. Savio and {De Chiffre}, Leonardo and M. Bossard",
    year = "2007",
    language = "English",
    booktitle = "Proc. Int. euspen Conf.",

    }

    Marinello, F, Bariani, P, Carmignato, S, Savio, E, De Chiffre, L & Bossard, M 2007, Increase of maximum detectable slope with optical profilers: theory and applicative examples, in Proc. Int. euspen Conf.. 7th International Conference of the European Society for Precision Engineering and Nanotechnology, Bremen, Germany, 20/05/2007.

    Increase of maximum detectable slope with optical profilers: theory and applicative examples, / Marinello, Francesco; Bariani, Paolo; Carmignato, S.; Savio, E.; De Chiffre, Leonardo; Bossard, M.

    Proc. Int. euspen Conf.. 2007.

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    TY - GEN

    T1 - Increase of maximum detectable slope with optical profilers: theory and applicative examples,

    AU - Marinello, Francesco

    AU - Bariani, Paolo

    AU - Carmignato, S.

    AU - Savio, E.

    AU - De Chiffre, Leonardo

    AU - Bossard, M.

    PY - 2007

    Y1 - 2007

    M3 - Article in proceedings

    BT - Proc. Int. euspen Conf.

    ER -

    Marinello F, Bariani P, Carmignato S, Savio E, De Chiffre L, Bossard M. Increase of maximum detectable slope with optical profilers: theory and applicative examples, In Proc. Int. euspen Conf.. 2007