Increase of maximum detectable slope with optical profilers: theory and applicative examples,

Francesco Marinello; Paolo Bariani; S. Carmignato; E. Savio; Leonardo De Chiffre; M. Bossard

Increase of maximum detectable slope with optical profilers: theory and applicative examples,

Francesco Marinello, Paolo Bariani, S. Carmignato, E. Savio, Leonardo De Chiffre, M. Bossard

University of Padua

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proc. Int. euspen Conf.
Publication date	2007
Publication status	Published - 2007
Event	7th International Conference of the European Society for Precision Engineering and Nanotechnology - Bremen, Germany Duration: 20 May 2007 → 24 May 2007 Conference number: 7

Conference

Conference	7th International Conference of the European Society for Precision Engineering and Nanotechnology
Number	7
Country/Territory	Germany
City	Bremen
Period	20/05/2007 → 24/05/2007

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@inproceedings{c09b9ed74da046a08e33fff6a797d31f,

title = "Increase of maximum detectable slope with optical profilers: theory and applicative examples,",

author = "Francesco Marinello and Paolo Bariani and S. Carmignato and E. Savio and {De Chiffre}, Leonardo and M. Bossard",

year = "2007",

language = "English",

booktitle = "Proc. Int. euspen Conf.",

note = "7th International Conference of the European Society for Precision Engineering and Nanotechnology, 7th EUSPEN ; Conference date: 20-05-2007 Through 24-05-2007",

}

TY - GEN

T1 - Increase of maximum detectable slope with optical profilers: theory and applicative examples,

AU - Marinello, Francesco

AU - Bariani, Paolo

AU - Carmignato, S.

AU - Savio, E.

AU - De Chiffre, Leonardo

AU - Bossard, M.

N1 - Conference code: 7

PY - 2007

Y1 - 2007

M3 - Article in proceedings

BT - Proc. Int. euspen Conf.

T2 - 7th International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 20 May 2007 through 24 May 2007

ER -