In-situ study of the etching of silicon surfaces

D.M. Smilgies, H. Wu, B.J. Hinch, K. Evans-Lutterodt

    Research output: Contribution to conferenceConference abstract for conferenceResearch

    Original languageEnglish
    Publication date1994
    Publication statusPublished - 1994
    Event14th European Conference on Surface Science - Leipzig, Germany
    Duration: 19 Sep 199423 Sep 1994
    Conference number: 14

    Conference

    Conference14th European Conference on Surface Science
    Number14
    CountryGermany
    CityLeipzig
    Period19/09/199423/09/1994

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