In-situ study of the etching of silicon surfaces

D.M. Smilgies, H. Wu, B.J. Hinch, K. Evans-Lutterodt

    Research output: Contribution to conferenceConference abstract for conferenceResearch

    Original languageEnglish
    Publication date1994
    Publication statusPublished - 1994
    Event14th European Conference on Surface Science - Leipzig, Germany
    Duration: 19 Sep 199423 Sep 1994
    Conference number: 14

    Conference

    Conference14th European Conference on Surface Science
    Number14
    CountryGermany
    CityLeipzig
    Period19/09/199423/09/1994

    Cite this

    Smilgies, D. M., Wu, H., Hinch, B. J., & Evans-Lutterodt, K. (1994). In-situ study of the etching of silicon surfaces. Abstract from 14th European Conference on Surface Science, Leipzig, Germany.
    Smilgies, D.M. ; Wu, H. ; Hinch, B.J. ; Evans-Lutterodt, K. / In-situ study of the etching of silicon surfaces. Abstract from 14th European Conference on Surface Science, Leipzig, Germany.
    @conference{fde9f13efc9e41238dc9f1404d7a8496,
    title = "In-situ study of the etching of silicon surfaces",
    keywords = "Materialer med s{\ae}rlige fysiske og kemiske egenskaber",
    author = "D.M. Smilgies and H. Wu and B.J. Hinch and K. Evans-Lutterodt",
    year = "1994",
    language = "English",
    note = "14th European Conference on Surface Science, ECOSS-14 ; Conference date: 19-09-1994 Through 23-09-1994",

    }

    Smilgies, DM, Wu, H, Hinch, BJ & Evans-Lutterodt, K 1994, 'In-situ study of the etching of silicon surfaces' 14th European Conference on Surface Science, Leipzig, Germany, 19/09/1994 - 23/09/1994, .

    In-situ study of the etching of silicon surfaces. / Smilgies, D.M.; Wu, H.; Hinch, B.J.; Evans-Lutterodt, K.

    1994. Abstract from 14th European Conference on Surface Science, Leipzig, Germany.

    Research output: Contribution to conferenceConference abstract for conferenceResearch

    TY - ABST

    T1 - In-situ study of the etching of silicon surfaces

    AU - Smilgies, D.M.

    AU - Wu, H.

    AU - Hinch, B.J.

    AU - Evans-Lutterodt, K.

    PY - 1994

    Y1 - 1994

    KW - Materialer med særlige fysiske og kemiske egenskaber

    M3 - Conference abstract for conference

    ER -

    Smilgies DM, Wu H, Hinch BJ, Evans-Lutterodt K. In-situ study of the etching of silicon surfaces. 1994. Abstract from 14th European Conference on Surface Science, Leipzig, Germany.