In-situ study of the etching of silicon surfaces

D.M. Smilgies, H. Wu, B.J. Hinch, K. Evans-Lutterodt

Research output: Contribution to conference › Conference abstract for conference › Research

Original language	English
Publication date	1994
Publication status	Published - 1994
Event	14th European Conference on Surface Science - Leipzig, Germany Duration: 19 Sept 1994 → 23 Sept 1994 Conference number: 14

Conference	14th European Conference on Surface Science
Number	14
Country/Territory	Germany
City	Leipzig
Period	19/09/1994 → 23/09/1994

OpenUrl availability

@conference{fde9f13efc9e41238dc9f1404d7a8496,

title = "In-situ study of the etching of silicon surfaces",

keywords = "Materialer med s{\ae}rlige fysiske og kemiske egenskaber",

author = "D.M. Smilgies and H. Wu and B.J. Hinch and K. Evans-Lutterodt",

year = "1994",

language = "English",

note = "14th European Conference on Surface Science, ECOSS-14 ; Conference date: 19-09-1994 Through 23-09-1994",

}

TY - ABST

T1 - In-situ study of the etching of silicon surfaces

AU - Smilgies, D.M.

AU - Wu, H.

AU - Hinch, B.J.

AU - Evans-Lutterodt, K.

N1 - Conference code: 14

PY - 1994

Y1 - 1994

KW - Materialer med særlige fysiske og kemiske egenskaber

M3 - Conference abstract for conference

T2 - 14th European Conference on Surface Science

Y2 - 19 September 1994 through 23 September 1994

ER -