In-situ observation of the self-alignment during FC-bonding
                under vacuum with and without H2

Jochen Friedrich Kuhmann

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	I E E E Photonics Technology Letters
Volume	8
Pages (from-to)	1665-1667
ISSN	1041-1135
Publication status	Published - 1996

OpenUrl availability

@article{d8157dfff87641a6904b34b2d9014ff5,

title = "In-situ observation of the self-alignment during FC-bonding under vacuum with and without H2",

author = "Kuhmann, {Jochen Friedrich}",

year = "1996",

language = "English",

volume = "8",

pages = "1665--1667",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers",

}