Improvement of the Release Yield of SU-8 Micro-Particle Filters by an additional ASE etch Step

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication date	2008
Publication status	Published - 2008
Event	Int. Conference on Micro- and Nanoengineering - Athens, Greece Duration: 1 Jan 2008 → …

Conference	Int. Conference on Micro- and Nanoengineering
City	Athens, Greece
Period	01/01/2008 → …

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