Improvement of the Release Yield of SU-8 Micro-Particle Filters by an additional ASE etch Step

Nadine-Nicole Noeth, Stephan Urs Keller, Anja Boisen

    Research output: Contribution to conference › Poster › Research › peer-review

    Original languageEnglish
    Publication date2008
    Publication statusPublished - 2008
    EventInt. Conference on Micro- and Nanoengineering - Athens, Greece
    Duration: 1 Jan 2008 → …

    Conference

    ConferenceInt. Conference on Micro- and Nanoengineering
    CityAthens, Greece
    Period01/01/2008 → …

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