Improvement of geometrical measurements from 3D-SEM reconstructions

Lorenzo Carli (Invited author), Leonardo De Chiffre (Invited author), Andy Horsewell (Invited author), S. Carmignato (Invited author), D. Santin (Invited author)

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


The quantification of 3D geometry at the nanometric scale is a major metrological challenge. In this work geometrical measurements on cylindrical items obtained with a 3D-SEM were investigated. Two items were measured: a wire gauge having a 0.25 mm nominal diameter and a hypodermic needle having an external diameter of 0.26mm. A series of measurements were performed to determine the accuracy of 3D reconstructions obtained using stereo-photogrammetry methods, finding a procedure to determine the optimum number of rotations of the object for an acceptable measuring uncertainty. It was determined that the diameter estimation performed using the 3D-SEM leads to an overestimation of approx. 7% compared to the reference values obtained using a 1-D length measuring machine. Standard deviation of SEM measurements performed on the wire gauge is approx. 1.5 times lower than the one performed on the hypodermic needle.
Original languageEnglish
Title of host publicationCIRP CAT Conference 2009
Publication date2009
Publication statusPublished - 2009
EventCIRP CAT Conference 2009 -
Duration: 1 Jan 2009 → …


ConferenceCIRP CAT Conference 2009
Period01/01/2009 → …


  • Nanometrology
  • Geometrical measurements
  • Traceability
  • Stereo-photogrammetry
  • 3D-SEM

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