Improvement of dose uniformity in plasma ion

Eugen Stamate, N. Holtzer, H. Sugai

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of International COE Forum on Plasma Science and Technology
Number of pages	2
Publication date	2004
Pages	111-112
Publication status	Published - 2004
Externally published	Yes
Event	International COE Forum on Plasma Science and Technology - Nagoya, Japan Duration: 5 Apr 2004 → 7 Apr 2004

Conference	International COE Forum on Plasma Science and Technology
Country/Territory	Japan
City	Nagoya
Period	05/04/2004 → 07/04/2004

OpenUrl availability

@inbook{fadb5edff6a84ba5b7ba64a229b7683b,

title = "Improvement of dose uniformity in plasma ion",

author = "Eugen Stamate and N. Holtzer and H. Sugai",

year = "2004",

language = "English",

pages = "111--112",

booktitle = "Proceedings of International COE Forum on Plasma Science and Technology",

note = "International COE Forum on Plasma Science and Technology ; Conference date: 05-04-2004 Through 07-04-2004",

}

TY - ABST

T1 - Improvement of dose uniformity in plasma ion

AU - Stamate, Eugen

AU - Holtzer, N.

AU - Sugai, H.

PY - 2004

Y1 - 2004

M3 - Conference abstract in proceedings

SP - 111

EP - 112

BT - Proceedings of International COE Forum on Plasma Science and Technology

T2 - International COE Forum on Plasma Science and Technology

Y2 - 5 April 2004 through 7 April 2004

ER -