Improved quality of zinc-oxide thin-films by in-situ annealing

Erik Bak Mikkelsen, Roger De Reus, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume6
    Pages (from-to)63-65
    ISSN0960-1317
    Publication statusPublished - 1996

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