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Improved passivation depth of porous fluorescent 6H-SiC with Si/C faces using atomic layer deposition
Kosuke Yanai, Weifang Lu*, Yoma Yamane, Keita Kodera, Yiyu Ou, Haiyan Ou, Satoshi Kamiyama, Tetsuya Takeuchi, Motoaki Iwaya, Isamu Akasaki
*Corresponding author for this work
Research output: Contribution to journal › Journal article › Research › peer-review