Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions

E. Rosseel, W. Vandervorst, T. Clarysse, J. Goossens, A. Moussa, Rong Lin, Dirch Hjorth Petersen, Peter Folmer Nielsen, Ole Hansen, N. S. Bennett, N. E. B. Cowern

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Fingerprint Dive into the research topics of 'Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions'. Together they form a unique fingerprint.

    Physics & Astronomy